Citation

BibTex format

@article{Koh:1999:10.1049/el:19990930,
author = {Koh, ATC and Thornhill, NF and Law, VJ},
doi = {10.1049/el:19990930},
journal = {ELECTRONICS LETTERS},
pages = {1383--1385},
title = {Principal component analysis of plasma harmonics in end-point detection of photoresist stripping},
url = {http://dx.doi.org/10.1049/el:19990930},
volume = {35},
year = {1999}
}
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RIS format (EndNote, RefMan)

TY  - JOUR
AU  - Koh,ATC
AU  - Thornhill,NF
AU  - Law,VJ
DO  - 10.1049/el:19990930
EP  - 1385
PY  - 1999///
SN  - 0013-5194
SP  - 1383
TI  - Principal component analysis of plasma harmonics in end-point detection of photoresist stripping
T2  - ELECTRONICS LETTERS
UR  - http://dx.doi.org/10.1049/el:19990930
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000082310900067&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL  - 35
ER  -
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Nina Thornhill, ABB/RAEng Professor of Process Automation
Centre for Process Systems Engineering
Department of Chemical Engineering
Imperial College London
South Kensington Campus, London SW7 2AZ

Tel: +44 (0)20 7594 6622
Email: n.thornhill@imperial.ac.uk