Citation

BibTex format

@article{Pagliarani:2006:10.1049/el:20064133,
author = {Pagliarani, A and Kenyon, AJ and Thornhill, NF and Sirisena, E and Lee, K and Law, VJ},
doi = {10.1049/el:20064133},
journal = {ELECTRONICS LETTERS},
pages = {120--121},
title = {Process harmonic pulling in RIE plasma-tool},
url = {http://dx.doi.org/10.1049/el:20064133},
volume = {42},
year = {2006}
}
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RIS format (EndNote, RefMan)

TY  - JOUR
AU  - Pagliarani,A
AU  - Kenyon,AJ
AU  - Thornhill,NF
AU  - Sirisena,E
AU  - Lee,K
AU  - Law,VJ
DO  - 10.1049/el:20064133
EP  - 121
PY  - 2006///
SN  - 0013-5194
SP  - 120
TI  - Process harmonic pulling in RIE plasma-tool
T2  - ELECTRONICS LETTERS
UR  - http://dx.doi.org/10.1049/el:20064133
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000235390500037&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL  - 42
ER  -
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Nina Thornhill, ABB/RAEng Professor of Process Automation
Centre for Process Systems Engineering
Department of Chemical Engineering
Imperial College London
South Kensington Campus, London SW7 2AZ

Tel: +44 (0)20 7594 6622
Email: n.thornhill@imperial.ac.uk