In this section
@inproceedings{Szostak:2018:10.1109/EMBC.2018.8513272,
author = {Szostak, KM and Constandinou, TG},
doi = {10.1109/EMBC.2018.8513272},
publisher = {IEEE},
title = {Hermetic packaging for implantable microsystems: effectiveness of sequentially electroplated AuSn alloy},
url = {http://dx.doi.org/10.1109/EMBC.2018.8513272},
year = {2018}
}
TY - CPAPER
AB - With modern microtechnology, there is an aggressive miniaturization of smart devices, despite an increasing level of integration and overall complexity. It is therefore becoming increasingly important to be achieve reliable, compact packaging. For implantable medical devices (IMDs), the package must additionally provide a high quality hermetic environmentto protect the device from the human body. For chip-scale devices, AuSn eutectic bonding offers the possibility of forming compact seals that achieve ultra-low permeability. A key feature is this can be achieved at process temperatures of below 350 C, therefore allowing for the integration of sensors and microsystems with CMOS electronics within a single package. Issueshowever such as solder wetting, void formation and controlling composition make formation of high-quality repeatable seals highly challenging. Towards this aim, this paper presents our experimental work characterizing the eutectic stack deposition. We detail our design methods and process flow, share our experiences in controlling electrochemical deposition of AuSnalloy and finally discuss usability of sequential electroplating process for the formation of hermetic eutectic bonds.
AU - Szostak,KM
AU - Constandinou,TG
DO - 10.1109/EMBC.2018.8513272
PB - IEEE
PY - 2018///
TI - Hermetic packaging for implantable microsystems: effectiveness of sequentially electroplated AuSn alloy
UR - http://dx.doi.org/10.1109/EMBC.2018.8513272
UR - http://hdl.handle.net/10044/1/58747
ER -