BibTex format
@inproceedings{Hanrahan:2012:10.1109/MEMSYS.2012.6170241,
author = {Hanrahan, B and Feldman, J and Misra, S and Waits, C and Mitcheson, PD and Ghodssi, R},
doi = {10.1109/MEMSYS.2012.6170241},
publisher = {IEEE},
title = {Off-The-Shelf MEMS for Rotary MEMS},
url = {http://dx.doi.org/10.1109/MEMSYS.2012.6170241},
year = {2012}
}
RIS format (EndNote, RefMan)
TY - CPAPER
AU - Hanrahan,B
AU - Feldman,J
AU - Misra,S
AU - Waits,C
AU - Mitcheson,PD
AU - Ghodssi,R
DO - 10.1109/MEMSYS.2012.6170241
PB - IEEE
PY - 2012///
SN - 1084-6999
TI - Off-The-Shelf MEMS for Rotary MEMS
UR - http://dx.doi.org/10.1109/MEMSYS.2012.6170241
UR - http://hdl.handle.net/10044/1/9907
ER -