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@article{Constandinou:2008:2008/782764,
author = {Constandinou, TG and Georgiou, J},
doi = {2008/782764},
journal = {Journal of Sensors},
pages = {1--7},
title = {Micro-Optoelectromechanical Tilt Sensor},
url = {http://dx.doi.org/10.1155/2008/782764},
year = {2008}
}

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TY  - JOUR
AB  - This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5 resolution over a 300 range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm × 2.5 mm.
AU  - Constandinou,TG
AU  - Georgiou,J
DO  - 2008/782764
EP  - 7
PY  - 2008///
SN  - 1687-725X
SP  - 1
TI  - Micro-Optoelectromechanical Tilt Sensor
T2  - Journal of Sensors
UR  - http://dx.doi.org/10.1155/2008/782764
UR  - http://hdl.handle.net/10044/1/1203
UR  - http://www.hindawi.com/GetArticle.aspx?doi=10.1155/2008/782764
UR  - http://hdl.handle.net/10044/1/1173
ER  -

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